عنوان
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3D Simulation of the Coil Geometry Effect on the Induction Heating Process in Czochralski Crystal Growth System
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نوع پژوهش
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مقاله چاپشده در مجلات علمی
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کلیدواژهها
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3D simulation, crystal growth, induction heating, RF-coils
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چکیده
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Herein, influence of coil geometry in a Czochralski crystal growth system is studied using 3D finite element method. Three different geometries for the helical RF‐coil including solenoid, conical solenoid, and rectangular are considered and distribution of magnetic flux density (through the system), produced heat in the RF‐coil and the graphite crucible, as well as heat volume integral are calculated. The obtained numerical results show that every considered coil produces a special heating structure due to its shape with some advantages and disadvantages.
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پژوهشگران
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حامد حیدری (نفر اول)، محمد حسین توکلی (نفر دوم)، عبدالجبار شکری (نفر سوم)، بهنام محمد مرادی (نفر چهارم)، امید محمد شریفی (نفر پنجم)، م. جمیل م. اسد (نفر ششم به بعد)
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