عنوان
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Influence of crucible and coil geometry on the induction heating process in Czochralski crystal growth system
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نوع پژوهش
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مقاله چاپشده در مجلات علمی
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کلیدواژهها
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Computer simulation, Czochralski method, Induction heating, Finite element method
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چکیده
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A 2D finite element method is employed to compute electromagnetic field as well as volumetric heat generation in an oxide Czochralski crystal growth system considering different shapes of metal crucible and different configurations of induction coil. The results show undeniable roles of crucible corner shape and setup of the RF-coil under the crucible in producing desirable heat pattern and avoid in in the CZ growth systems.
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پژوهشگران
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حسین خدامرادی (نفر اول)، محمد حسین توکلی (نفر دوم)، خیراله محمدی (نفر سوم)
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