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Abstract
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An electrically actuated microplate forms one side of the variable capacity air- gap capacitor and the other side is a stationary electrode connected to the output circuit, as shown in Fig. 1. The capacitive microelectromechanical systems (MEMS) microplates are the actuation components in many micropumps, micromirrors, microphones, microsensors, etc., and are used to open or close an electric circuit by an electrostatic force [1]. The actuation is achieved by applying a DC polarization voltage to the microplate to deflect it to contact the output circuit, at which the switch is in the on-state. When removing the DC voltage, the microplate is released to its original position, at which the switch is in the off-state. Applying a DC voltage to the structure creates an impulsive force, resulting in transient vibration of the system.
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