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Mohammad Hossein Tavakoli

Academic rank: Associate Professor
ORCID:
Education: PhD.
ScopusId: 16242834500
HIndex:
Faculty: Faculty of Science
Address:
Phone:

Research

Title
Electromagnetic safety and minimum wall thickness of a steel chamber for inductively Czochralski crystal growth furnace
Type
JournalPaper
Keywords
Czochralski, Induction heating, RF-coil, Electromagnetic safety, Electromagnetic shield.
Year
2023
Journal JOM
DOI
Researchers Sanaz Hadidchi ، Mohammad Hossein Tavakoli

Abstract

In this article, a set of two-dimensional computer simulations are performed to investigate the required minimum thickness of a steel chamber wall used for an inductively Czochralski crystal growth furnace versus the frequency of driving electric current in the RF-coil considering safety standards. It has been found that for all considered frequencies (1 Hz - 100 kHz), the intensity of the electric field is in the safe zone, contrary to the magnetic field. Therefore, a minimum wall thickness of the chamber is necessary for decreasing the magnetic field intensity to a standard safe level was also observed that the least chamber thickness was reduced by increasing the applied coil frequency. In addition, it was found that by using an electromagnetic shield wrapping the coil with a suitable shape and high electrical conductivity (σ > 107 S/m), a significant decrease in the chamber's minimum thickness occurs.