Indium tin oxide (ITO) thin films were prepared by the electron beam evaporation method. The films were annealed at different temperatures. The surface texture of ITO films before and after annealing has been characterized through analyzing the surface profile ofAFMimages using the wavelet transform (WT) method. Continuous wavelet transform (CWT) coefficients as a function of the scale factor indicate that it is possible to distinguish the ‘smooth’ or ‘rough’ areas of the surface profile. The central advantages of theWTmethod compared to the existing signal processing methods are its space-frequency localization and multi-scale analysis of the roughness features.
