In this work it has been noticed that the topography of the annealed ITO thin film has very definite, dominant and predictable roles in the evolution of fractal and superstructures in ITO thin film topographies acquired by atomic force microscopy (AFM). It is found that, the spectral roughness of the films increases as the annealing temperature increases. The PSDs of all thin films exhibit inverse power law variation at the high spatial frequency region suggesting the existence of fractal components in the surface topographies. The fractal dimensions of the ITO film surfaces are in the range of 2.67 to 2.87.
