In this work, we developed the multifractality and its formalism to investigate the surface topographies of ITO thin films prepared by electron beam deposition method for various annealing temperatures from their atomic force microscopy (AFM) images. Multifractal analysis shows that the spectrum width, ∆α (∆α = αmax – αmin), of the multifractal spectra, f (α), can be used to characterize the surface roughness of the ITO films quantitatively. Also, it is found that the f (α) shapes of the as-deposited and annealed films remained left hooked (that is ∆f = f (αmin) - f (αmax) > 0), and falls within the range 0.149 – 0.677 depending upon the annealing temperatures.
