In this study, Indium Tin Oxide(ITO) thin films in same conditions but with different thicnesses134 nm, 145 nm and 290 nm have been prepared by electron beam evaporation method on glass substrates at room temperatures. by spectroscopic ellipsometry technique using optical constants, index of refraction (n), extinction coefficient (k), in the wavelength rang 370 – 1050 nm was measured. percent pass and absorption versus wavelength was measured. the results show that the optical model with data from the ellipsometry corresponded.