Evapotranspiration is critical to many applications including water resource management, irrigation scheduling, and environmental studies. Many models based on meteorological data have already been developed to estimate reference evapotranspiration ET0 in various climatic and geographical conditions. The main purpose of this study was to evaluate the performances of the Makkink, Priestley-Taylor, and Hargreaves models versus the Penman-Monteith FAO-56 PMF-56 method in arid and semiarid regions of Iran during 1993–2005 and to identify the alternative ET0 model that presents results closest to the PMF-56 method. Additionally, a regional estimation of monthly ET0 with the best-performed model is presented by using the spatially distributed physical parameters and geographical information system. The results indicated that the Hargreaves model was the best model to estimate ET0 in eastern arid and semiarid regions of Iran. The spatial distribution maps of ET0 showed that ET0 values increased from north to south as the aridity increased in the study area. The estimated total monthly ET0 revealed a significant variation during the growing seasons April– September so that the study region experienced the highest and lowest ET0 values of 250 and 80 mm in July and April, respectively.